Failure analysis of I/O with ESD protection devices in advanced CMOS technologies

Abstract

Many types of ESD protection devices such as diodes, NFETs, SCRs: and RC-triggered power clamps: having different failure mechanisms: are used in advanced CMOS technologies. Circuit schematic analysis and SEM failure analysis are utilized to clearly predict and identify the failing I/O driver/receiver devices and/or the various ESD protection devices during an ESD event. © 2007 IEEE.