Fabrication of CMOS on ultrathin SOI obtained by epitaxial lateral overgrowth and chemical-mechanical polishing

Abstract

A novel method for obtaining ultra-thin, defect-free silicon on insulator (SOI) film is introduced. This technique uses epitaxial lateral overgrowth of Si (ELO) and chemical-mechanical polishing (CMP). SOI films with thicknesses of 100 nm were obtained controllably. These films were used in fabrication and dual poly CMOS devices. The quality of the SOI film obtained is the same as that of bulk silicon, and the device characteristics are comparable with those of devices fabricated on bulk. A minimum geometry unloaded inverter ring oscillator on SOI film obtained by ELO and CMP showed a speed improvement of 3× over the bulk devices.