Experimental Study of Laser Formed Connections for LSI Wafer Personalization

Abstract

Expenmental studies of connections formed in MOS-type structures by nanosecond dye laser pulses are described. Of particular importance are results relating to the reliability and reproducibility of the connection process. A model for the connection process is presented which correlates well with the various observations and experiments. Copyright © 1975 by The Institute of Electrical and Electronics Engineers, Inc.