Chia-Fu Hsu, Peter S. Zory, et al.
IEEE Journal on Selected Topics in Quantum Electronics
Paper
Experimental Study of Laser Formed Connections for LSI Wafer Personalization
Abstract
Expenmental studies of connections formed in MOS-type structures by nanosecond dye laser pulses are described. Of particular importance are results relating to the reliability and reproducibility of the connection process. A model for the connection process is presented which correlates well with the various observations and experiments. Copyright © 1975 by The Institute of Electrical and Electronics Engineers, Inc.
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