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Publication
NATO Advanced Study Institute 1985
Conference paper
EXAMPLES OF ION BOMBARDMENT EFFECTS ON FILM GROWTH AND EROSION PROCESSES - PLASMA AND BEAM EXPERIMENTS.
Abstract
The purpose of this report is to review some of the effects of energetic particle bombardment both on film growth and on erosion processes as encountered in commonly used plasma processing technologies. Comparisons between plasma experiments and U. H. V. beam experiments will be made.