E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mo films were prepared by bias sputtering in a dc-triode system using an Ar/N2 mixture as sputter gas. The substrates were held at -180°C. The resulting changes of the residual resistivity ρ0 and transition temperature to superconductivity Tc were measured as a function of the nitrogen concentration within the films cN. Large Tc increases up to 7.6 K have been found for highly disordered films (ρ0=100 μΩ cm, cN =10 at. %). For still higher cN values, Tc decreased to about 5 K, while the resistivity increased up to 500 μΩ cm, exhibiting a negative temperature dependence typical for amorphous materials. Our results will be compared to an implantation experiment, where N+ ions have been implanted into preexisting Mo films.
E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
P.S. Bagus, C.J. Nelin, et al.
Journal of Electron Spectroscopy and Related Phenomena
E. Sawatzky, E. Kay
Journal of Applied Physics
E. Kay, A. Dilks, et al.
Journal of Macromolecular Science: Part A - Chemistry