Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
In any many-body variational approach to electron-atom scattering theory certain types of matrix elements not encountered in bound state problems must be evaluated. In this paper the new integrals which occur are identified and procedures for obtaining all but the exchange type integrals in all reasonable cases are presented. The techniques discussed are oriented toward rapid and accurate evaluation on a computer. A number of previously unpublished formulas and properties of integrals involving spherical Bessel functions are presented. © 1969.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Andrew Skumanich
SPIE Optics Quebec 1993
Y.Y. Li, K.S. Leung, et al.
J Combin Optim