William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010