Publication
Microelectronic Engineering
Paper

Energy and time-resolved photoemission in a promising new approach for contactless integrated-circuit testing

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Abstract

A novel approach to contactless measurement of voltages on internal nodes of integrated circuits is presented. The method is based on time-resolved photoemission exploiting the single-photon process with short laser pulses in the ultra-violet. The method allows spatial resolution in the submicron range given by the diffraction limit for UV photons, a time resolution of a few picoseconds given by the width of the laser pulses and the electron transit-time effect, and a voltage resolution of a few microvolts within a signal integration time of one second. © 1986.

Date

01 Jan 1986

Publication

Microelectronic Engineering

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