Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
A novel approach to contactless measurement of voltages on internal nodes of integrated circuits is presented. The method is based on time-resolved photoemission exploiting the single-photon process with short laser pulses in the ultra-violet. The method allows spatial resolution in the submicron range given by the diffraction limit for UV photons, a time resolution of a few picoseconds given by the width of the laser pulses and the electron transit-time effect, and a voltage resolution of a few microvolts within a signal integration time of one second. © 1986.
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
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Technical Digest-International Electron Devices Meeting
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT