About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Paper
Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers
Abstract
We have designed, fabricated, and tested ferromagnetic micromechanical magnetometers and have characterized their dynamic response and shock resistance. The magnetometer design is similar to a compass consisting of a ferromagnetic plate and a pair of torsion beams. The susceptibility of these MEMS magnetometers to squeeze film damping is analyzed and compared to experimental results. The torsion beam geometry of the magnetometer is such that longer beams can be used to obtain a higher magnetic sensitivity without compromising device shock resistance.