Publication
Review of Scientific Instruments
Paper

Dynamic piezoelectric translation devices

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Abstract

The principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric fine-positioning device. The device provides step sizes of 0.04-0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range. It is powered by a sawtooth electric waveform of 60-300-V amplitude and useable for loads of up to 1 kg and probably even more. Mechanical parts and driver electronics are extremely simple, reliable, and easy to operate.

Date

01 Dec 1987

Publication

Review of Scientific Instruments

Authors

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