CLEO 2009
Conference paper

Digital deterministic control of slow light in photonic crystal waveguide membranes through atomic layer deposition


We present for the first time digital and deterministic control of slow-light in photonic crystal silicon membranes through atomic layer deposition. Supported by ab initio calculations and our earlier advancements, the tuning of the slow group indices and higher-order dispersion characteristics are observed in the chip-scale Mach-Zehnder interferometers, along with control of the surface-state coupling. This deterministic control is a CMOS process that unambiguously tunes the slow-light dispersion for ultrahigh-bandwidth delay lines and nonlinear nanophotonics. © 2009 Optical Society of America.