S. Ambrogio, Pritish Narayanan, et al.
Nature
In order to correct errors in a previously published work on a treatment of two-dimensional coupled-wave theory, a complete derivation of the two-dimensional ‘overlap grating’ coupled wave equations is given. By using the Riemann method, a corrected solution to the equations in closed mathematical form is obtained. On the basis of this solution a brief investigation of the diffraction properties of finite-sized gratings, and in particular the dependence of diffraction efficiency on the geometric size of gratings, is given. © 2004 Taylor & Francis Group, LLC.
S. Ambrogio, Pritish Narayanan, et al.
Nature
H. Y. Chang, Geoffrey W. Burr, et al.
IBM J. Res. Dev
T. Grosjean, M. Mivelle, et al.
Optics Express
Geoffrey W. Burr
SPIE Optical Science and Technology 2003