S. Sidler, Irem Boybat, et al.
ESSDERC 2016
In order to correct errors in a previously published work on a treatment of two-dimensional coupled-wave theory, a complete derivation of the two-dimensional ‘overlap grating’ coupled wave equations is given. By using the Riemann method, a corrected solution to the equations in closed mathematical form is obtained. On the basis of this solution a brief investigation of the diffraction properties of finite-sized gratings, and in particular the dependence of diffraction efficiency on the geometric size of gratings, is given. © 2004 Taylor & Francis Group, LLC.
S. Sidler, Irem Boybat, et al.
ESSDERC 2016
Geoffrey W. Burr
Optics Letters
Geoffrey W. Burr, Edmond Chow, et al.
NPIS 2005
Victor Chan, A. Gasasira, et al.
IEEE Trans Semicond Manuf