E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The use of He-diffraction as a method in surface crystallography is briefly reviewed. To illustrate the possibilities and limitations a few examples of surface structures are presented and discussed. Current problems and future needs are outlined. © 1982 IOP Publishing Ltd.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Ming L. Yu
Physical Review B
T.N. Morgan
Semiconductor Science and Technology
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997