William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The use of He-diffraction as a method in surface crystallography is briefly reviewed. To illustrate the possibilities and limitations a few examples of surface structures are presented and discussed. Current problems and future needs are outlined. © 1982 IOP Publishing Ltd.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Peter J. Price
Surface Science
Ming L. Yu
Physical Review B
Michiel Sprik
Journal of Physics Condensed Matter