Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The use of He-diffraction as a method in surface crystallography is briefly reviewed. To illustrate the possibilities and limitations a few examples of surface structures are presented and discussed. Current problems and future needs are outlined. © 1982 IOP Publishing Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ming L. Yu
Physical Review B