Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Yao Qi, Raja Das, et al.
ISSTA 2009
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005