DESIGN FOR A PLANAR XY ROBOTIC FINE POSITIONING DEVICE.

Abstract

We describe in this paper a small, fast, precise positioner which can be attached to the terminal link of a general purpose robot for assembly and inspection tasks. The device is a very compact combination of two-dimensional linear motor, flexure springs, position sensor and digital controller. Peak velocities and accelerations of 24. 8 cm/sec and 8. 7 g are achieved. Positioning resolution is 0. 5 mu m using the built-in sensor, and compliance can be varied dynamically by the digital controller loop gain. Design considerations, discussion of the major elements of the device, and performance measurements are presented.