Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
In this paper we solve the decision problem of a certain second- order mathematical theory and apply it to obtain a large number of decidability results. The method of solution involves the development of a theory of automata on infinite trees—a chapter in combinatorial mathematics which may be of independent interest.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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IS&T/SPIE Electronic Imaging 1994
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CCS 2024
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ISIT 2005