Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Functional testing of rapid single-flux-quantum (RSFQ) logic circuits at high speed is necessary to further optimize circuit design, but it is not easy to do off-chip testing because of the high speed and small amplitude of SFQ pulses. This paper will present the design and test results of an 20 Gb/s bit-by-bit on-chip high-speed digital test system based on data-driven self-timed (DDST) circuits. © 1997 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
T.N. Morgan
Semiconductor Science and Technology
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications