Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Inverse iteration is widely used to compute the eigenvectors of a matrix once accurate eigenvalues are known. We discuss various issues involved in any implementation of inverse iteration for real, symmetric matrices. Current implementations resort to reorthogonalization when eigenvalues agree to more than three digits relative to the norm. Such reorthogonalization can have unexpected consequences. Indeed, as we show in this paper, the implementations in EISPACK and LAPACK may fail. We illustrate with both theoretical and empirical failures.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007