Cross-linking of poly{1,1-diaryl(alkyl,aryl) 1-silacyclobutanes} under electron beam and deep UV irradiation

E. Babich

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

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IVMC 1995

E. Babich, J. Paraszczak, et al.

Microelectronic Engineering

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IEEE Electron Device Letters