Conference paper
Dopant diffusion in silicides: Effect of diffusion paths
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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Carol Stanis, J.M. Cotte, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Journal of Applied Physics
F.K. LeGoues, P.S. Ho
VMIC 1985
V.P. Kesan, F.K. LeGoues, et al.
Physical Review B