J. Tersoff
Physical Review Letters
We show that in epitaxial growth, there is a critical island size Rc at which a second layer nucleates on top of the island. This provides a simple perspective on the conditions for smooth versus rough growth: For island spacing Ln, if Rc<Ln the islands will nucleate a second layer before coalescence, giving multilayer growth. This occurs when there is a sufficiently large diffusion barrier (the "Schwoebel barrier") at the island edge. We demonstrate that surfactants can enforce layer-by-layer growth by reducing the island spacing. The dependence upon temperature is also explained. © 1994 The American Physical Society.
J. Tersoff
Physical Review Letters
R.M. Tromp, E.J. Van Loenen
Physical Review B
B.J. Spencer, P.W. Voorhees, et al.
Physical Review Letters
M. Poppeller, E. Cartier, et al.
Microelectronic Engineering