Revanth Kodoru, Atanu Saha, et al.
arXiv
Revanth Kodoru, Atanu Saha, et al.
arXiv
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008