Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007