Reena Elangovan, Shubham Jain, et al.
ACM TODAES
Conjugated polymers in the nondoped and doped conducting state have an array of potential applications in the microelectronics industry. Conducting polymers are effective discharge layers as well as conducting resists in electron beam lithography, find applications in metallization (electrolytic and electroless) of plated through-holes for printed circuit board technology, provide excellent electrostatic discharge protection for packages and housings of electronic equipment, provide excellent corrosion protection for metals, and may have applications in electromagnetic interference shielding. This paper reviews some of these applications and briefly describes possible future applications of conducting polymers for use as interconnections or for electronic devices.
Reena Elangovan, Shubham Jain, et al.
ACM TODAES
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
B. Wagle
EJOR