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Applied Physics Letters
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Conducting atomic-force-microscope electrical characterization of submicron magnetic tunnel junctions

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Abstract

The ability to electrically characterize submicron magnetic tunnel junctions (MTJ) using a conducting atomic force microscopy (CAFM) was discussed. The brief processing was found to save time and resources, and reduced the potential for damage to the MTJs. The sample requirements, CAFM processing route and the tip preparation were also elaborated.

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Publication

Applied Physics Letters

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