John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011