Microlithography 2000
Conference paper

Patterning of highly conducting polyaniline films


Polyaniline is a family of soluble, electrically conducting polymers that have a potential for a number of applications. They are a unique class of electronic materials which combines the electronic properties of metals with the mechanical and physical properties, and the processing advantages of a conventional organic polymer. In this paper, we will discuss the synthesis, and formulation of a highly conductive polyaniline that has applications as electrodes or thin film wiring. However, for these and other uses it is necessary to pattern the conducting polymer lithographically. We will discuss the various ways of patterning polyaniline, either indirectly or using the conventional photoresist technology. The effects of each patterning procedure on the conductivity of the polyaniline will also be covered.