CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects

Abstract

Compact germanium waveguide photodetector with 38fF capacitance, 40Gbps bandwidth and 0.4A/W responsivity is demonstrated. High-quality Ge-on-insulator singlecrystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization. © 2008 Optical Society of America.