CMOS compatible cost-efficient fabrication of SOI grating couplers

A CMOS compatible process for the cost-efficient fabrication of SOI grating couplers is presented. Test devices have been fabricated and characterized in a fully automated measurement setup at telecom wavelength (1550 nm). Coupling efficiencies of -3.6 and -4.1 dB have been achieved for TE and TM polarization, respectively. The 3 dB bandwidth has been measured to be about 50 nm. © 2008 Elsevier B.V. All rights reserved.