Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
A CMOS compatible process for the cost-efficient fabrication of SOI grating couplers is presented. Test devices have been fabricated and characterized in a fully automated measurement setup at telecom wavelength (1550 nm). Coupling efficiencies of -3.6 and -4.1 dB have been achieved for TE and TM polarization, respectively. The 3 dB bandwidth has been measured to be about 50 nm. © 2008 Elsevier B.V. All rights reserved.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
T.N. Morgan
Semiconductor Science and Technology