Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of cycloaliphatic diepoxides with cleavable acetal links were synthesized and characterized. These materials were shown to undergo thermosetting reactions with cyclic anhydride in very similar fashion to a commercial cycloaliphatic epoxide, but cured samples were easily dissolved in a variety of acid-containing solvent mixtures. Such materials can extend the utility of thermosetting epoxies by preserving their positive attributes while eliminating their well known intractability after curing. The latter property is particularly a problem for manufacturers designing products for disassembly at end of use in order to facilitate recycling. © 1996 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Ellen J. Yoffa, David Adler
Physical Review B