Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper we will classify all the minimal bilinear algorithms for computing the coefficients of (∑ i=0 n-1xiui)( ∑ i=0 n-1yiui) mod Q(u)l where deg Q(u)=j,jl=n and Q(u) is irreducible. The case where l=1 was studied in [1]. For l>1 the main results are that we have to distinguish between two cases: j>1 and j=1. The first case is discussed here while the second is classified in [4]. For j>1 it is shown that up to equivalence every minimal (2n-1 multiplications) bilinear algorithm for computing the coefficients of (∑ i=0 n-1xiui)( ∑ i=0 n-1yiui) mod Q(u)l is done by first computing the coefficients of (∑ i=0 n-1xiui)( ∑ i=0 n-1yiui) and then reducing it modulo Q(u)l (similar to the case l = 1, [1]). © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Victor Valls, Panagiotis Promponas, et al.
IEEE Communications Magazine
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
Raghu Krishnapuram, Krishna Kummamuru
IFSA 2003