Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
When a map has one positive Lyapunov exponent, its attractors often look like multidimensional, Cantorial plates of spaghetti. What saves the situation is that there is a deterministic jumping from strand to strand. We propose to approximate such attractors as finite sets of K suitably prescribed curves, each parametrized by an interval. The action of the map on each attractor is then approximated by a map that takes a set of curves into itself, and we graph it on a KxK checkerboard as a discontinuous one-dimensional map that captures the quantitative dynamics of the original system when K is sufficiently large. © 1995 American Institute of Physics.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Charles A Micchelli
Journal of Approximation Theory
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IEEE Transactions on Pattern Analysis and Machine Intelligence
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ISIT 2007