Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
In this paper we present results from a study where we applied the OCP (Open Circuit Potential) technique to investigate the oxidation kinetics of Si(100) and Si(111) surfaces in DI/O3 as a function of the ozone concentration. With this fast real time and in-situ measurement method we confirm findings from earlier studies, where a faster initial oxidation rate of Si(111) compared to (100) has been observed in the gas-phase and also the relationship between final tchemox (thickness of the chemical oxide) and the dissolved O3 concentration. Through the visualization of the two-step HF etching process of silicon oxide on Si by EDP-OCP (Electrochemical Depth Profiling-OCP) we illuminate the slower H-passivation kinetics for Si(111) and the impact of the dissolved O3 concentration on the surface roughness of Si (100).
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M. Hargrove, S.W. Crowder, et al.
IEDM 1998