B.P. Linder, V.K. Paruchuri, et al.
ECS Meeting 2007
CMOS logic technology has been evolving so quickly and 65nm logic technology is already in the production. In this paper, some of the common major challenges and issues of 65nm CMOS logic technology are discussed. ©The Electrochemical Society.
B.P. Linder, V.K. Paruchuri, et al.
ECS Meeting 2007
Dae-Gyu Park, M. Chudzik, et al.
ECS Meeting 2007
K.L. Saenger, J.P. De Souza, et al.
ECS Meeting 2007
M. Takayanagi
ECS Meeting 2007