Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Capacitance Free Generation and Detection of Subpicosecond Electrical Pulses on Coplanar Transmission Lines
Abstract
Based on a reanalysis of previous work and new experimental measurements, we conclude that the parasitic capacitance at the generation site is negligible for sliding contact excitation of small dimension coplanar transmission lines. © 1988 IEEE
Related
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures