M. Niksch, G. Binnig
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 A and a vertical resolution less than 1 A. © 1986 The American Physical Society.
M. Niksch, G. Binnig
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
M. Despont, J. Brugger, et al.
MEMS 1999
G. Cross, M. Despont, et al.
MRS Proceedings 2000
D.G. Schlom, D. Anselmetti, et al.
Journal of Crystal Growth