P. Mächtle, R. Berger, et al.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Paper
Atomic force microscope
Abstract
The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 A and a vertical resolution less than 1 A. © 1986 The American Physical Society.
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