Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Additional calculations of the one-phonon spectral function in aluminum are presented. Results are given in the temperature range 300 T 900 K for phonons propagating along the symmetry directions [100], [110], [111], and [310]. The frequency shifts and linewidths of the [310] phonons are compared with the high-temperature neutron scattering data of Larsson et al. In addition, for those phonons whose resonance shapes develop prominent structure, the spectral functions are explicitly displayed and discussed. © 1971 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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