Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Additional calculations of the one-phonon spectral function in aluminum are presented. Results are given in the temperature range 300 T 900 K for phonons propagating along the symmetry directions [100], [110], [111], and [310]. The frequency shifts and linewidths of the [310] phonons are compared with the high-temperature neutron scattering data of Larsson et al. In addition, for those phonons whose resonance shapes develop prominent structure, the spectral functions are explicitly displayed and discussed. © 1971 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Frank Stem
C R C Critical Reviews in Solid State Sciences
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990