Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Aerosol problems in clean technologies for microelectronics
Abstract
Aerosol research priorities as related to contamination control in themicroelectronics industry are outlined, based largely on the National Science Foundation Workshop of November 1990 and the author's contribution to that workshop. © 1991 Pergamon Press plc.
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