I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Paper
Aerosol problems in clean technologies for microelectronics
Abstract
Aerosol research priorities as related to contamination control in themicroelectronics industry are outlined, based largely on the National Science Foundation Workshop of November 1990 and the author's contribution to that workshop. © 1991 Pergamon Press plc.
Related
Conference paper
True 3-D displays for avionics and mission crewstations
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
A. Reisman, M. Berkenblit, et al.
JES
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990