Advanced optical test of an array an 65 nm CMOS technology

Abstract

In this paper we present the advanced optical testing of an array fabricated in IBM's 65 nm SOI CMOS technology, using the Picosecond Imaging Circuit Analysis (PICA) [1-11] tool equipped with the Superconducting Single-Photon Detector (SSPD) [12,13]. Based on the results of the optical analysis we were able to confirm a time collision problem in the readout circuit of the array. In the following sections we will also discuss the use of an innovative optical packaging for testing chips requiring wire-bonding, along with record low voltage optical measurements, down to 0.7 V. Copyright ©2005 ASM International®.