E. Burstein
Ferroelectrics
Paper
Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching
Abstract
Far-ultraviolet light (185 nm) rapidly etches poly(ethylene terephthalate) films without any subsequent processing. Both non-oxidative and oxidative mechanisms are operative. © 1982.
Related
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Lawrence Suchow, Norman R. Stemple
JES
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001