J.H. Stathis, R. Bolam, et al.
INFOS 2005
Paper
Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching
Abstract
Far-ultraviolet light (185 nm) rapidly etches poly(ethylene terephthalate) films without any subsequent processing. Both non-oxidative and oxidative mechanisms are operative. © 1982.
Related
Mark W. Dowley
Solid State Communications
Sung Ho Kim, Oun-Ho Park, et al.
Small
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron