Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011