J.C. Marinace
JES
Stabilization of the morphology in thin diblock copolymer films is critical for the generation of robust templates for subsequent device fabrication. Copolymers containing thermally cross-linkable groups, such as benzocyclobutene (BCB), can be annealed to induce an ordered microdomain morphology and then subsequently heated to cross-link the system, locking in the morphology and eliminating the need for multistep processing. Poly[(styrene-r-BCB)-b-lactic acid] (PSBCB-b-PLA) was synthesized by a combination of living free radical and ring-opening polymerizations. Thin films (∼30 nm) of PSBCB-b-PLA annealed at 170°C, followed by cross-linking at 200°C, showed that the ordered and oriented microdomain morphology was preserved. For PSBCB-b-PLA, with PLA volume fractions of 0.24 and 0.36, arrays of cylindrical microdomains of PLA oriented normal to the surface were produced in a cross-linked PS matrix. Washing these films with a weak base degraded and removed the PLA, producing a nanoporous cross-linked template. © 2005 American Chemical Society.
J.C. Marinace
JES
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989