About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Paper
A solid-state pressure-sensing microsystem for biomedical applications
Abstract
A pressure-sensing system consisting of a miniature silicon capacitive-type sensor, made with the silicon fusion bonding technique, and a detection integrated circuit is presented. The entire system converts pressure changes, in the pressure range useful for biomedical applications, to frequency changes. The system is equipped with a reference capacitor to cancel out the temperature dependence and the ageing effects. © 1997 Elsevier Science S.A.