A solid-state pressure-sensing microsystem for biomedical applications

A pressure-sensing system consisting of a miniature silicon capacitive-type sensor, made with the silicon fusion bonding technique, and a detection integrated circuit is presented. The entire system converts pressure changes, in the pressure range useful for biomedical applications, to frequency changes. The system is equipped with a reference capacitor to cancel out the temperature dependence and the ageing effects. © 1997 Elsevier Science S.A.