Conference paper
Integration of direct plating of Cu onto a CVD Ru liner
S. Malhotra, D. Canaperi, et al.
AMC 2004
S. Malhotra, D. Canaperi, et al.
AMC 2004
M.W. Lane, C.E. Murray, et al.
Applied Physics Letters
E.G. Colgan, K.P. Rodbell, et al.
Journal of Applied Physics
M.D. Thouless, K.P. Rodbell, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films