A. Grill, V.V. Patel, et al.
Journal of Applied Physics
Paper
A comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques
Abstract
No abstract available.
Related
E.G. Colgan, K.P. Rodbell, et al.
MRS Proceedings 1993
C.-K. Hu, M.B. Small, et al.
MRS Proceedings 1993
J.M.E. Harper, K.P. Rodbell
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures