Experimental low temperature DRAM
W.H. Henkels, N.C.-C. Lu, et al.
VLSI Circuits 1989
The appearance of stationary stripes in a voltage contrast SEM image of a circuit, generally known as voltage coding, is a commonly used technique for tracing circuit lines for failure analysis and for locating nodes for waveform measurements. Maintaining a steady striped image requires synchronizing a pattern generator to the SEM raster scan. A circuit is described which can be attached to any SEM to perform this synchronization, and which has a number of features which extend the usefulness of voltage coding. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.
W.H. Henkels, N.C.-C. Lu, et al.
VLSI Circuits 1989
J.N. Burghartz, T.O. Sedgwick, et al.
BCTM 1993
J. Warnock, P.F. Lu, et al.
IEDM 1990
Keith A. Jenkins, J.N. Burghartz, et al.
IEDM 1993