A. Deutsch, G.V. Kopcsay, et al.
ECTC 1997
The appearance of stationary stripes in a voltage contrast SEM image of a circuit, generally known as voltage coding, is a commonly used technique for tracing circuit lines for failure analysis and for locating nodes for waveform measurements. Maintaining a steady striped image requires synchronizing a pattern generator to the SEM raster scan. A circuit is described which can be attached to any SEM to perform this synchronization, and which has a number of features which extend the usefulness of voltage coding. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.
A. Deutsch, G.V. Kopcsay, et al.
ECTC 1997
J.N. Burghartz, M. Soyuer, et al.
IEDM 1995
Keith A. Jenkins, J.Y.-C. Sun, et al.
IEEE Electron Device Letters
D.J. Pearson, S.K. Reynolds, et al.
ISSCC 1995