High Performance CMOS Fabricated on Hybrid Substrate with Different Crystal Orientations

Abstract

A novel structure and technology has been developed for high performance CMOS using hybrid silicon substrates with different crystal orientations (namely pFET on (110)-oriented surface and nFET on (100) surface) through wafer bonding and selective epitaxy. CMOS devices with physical gate oxide thickness of 1.2nm have been demonstrated, with substantial enhancement of pFET drive current at L poly≤80nm.