Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results at IITC/MAM 2011

Future of PECVD and spin-on ultra low-k materials
- - Willi Volksen
  - Theo Frot
  - et al.
- 2011
- IITC/MAM 2011
Post Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- IITC/MAM 2011
Optimization of porous ultra low- dielectrics (κ≤ 2.55) for 28nm generation
- - D. Kioussis
  - E.T. Ryan
  - et al.
- 2011
- IITC/MAM 2011
64 nm pitch Cu dual-damascene interconnects using pitch split double exposure patterning scheme
- - Shyng-Tsong Chen
  - Hideyuki Tomizawa
  - et al.
- 2011
- IITC/MAM 2011
Improvement of RC performance for advanced ULK/Cu interconnects with CVD hybrid dielectric/metal liner
- - M. Tagami
  - C.-C. Yang
  - et al.
- 2011
- IITC/MAM 2011
CVD Co capping layers for Cu/low-k interconnects: Cu em enhancement vs. Co thickness
- - C.-C. Yang
  - F. Baumann
  - et al.
- 2011
- IITC/MAM 2011