Self-aligned S/D regions for InGaAs MOSFETs
- Lukas Czornomaz
- Mario El Kazzi
- et al.
- 2011
- ESSDERC 2011
Conference paper
Publications
2 results at ESSDERC 2011
High-k/metal gate innovations enabling continued CMOS scaling
- 2011
- ESSDERC 2011
Conference paper