SOI FinFET versus bulk FinFET for 10nm and below
- Terence B. Hook
- F. Allibert
- et al.
- 2014
- S3S 2014
Conference paper
Publications
3 results at S3S 2014
Dielectric isolated FinFETs on bulk substrate
- Darsen Lu
- Kangguo Cheng
- et al.
- 2014
- S3S 2014
Conference paperElastic relaxation in intrinsically-strained Fins: Simulations, physical and electrical characterization
- F. Allibert
- Pierre Morin
- et al.
- 2014
- S3S 2014
Conference paper