Overview of the EU FP7-project HISTORIC
- Geert Morthier
- Rajesh Kumar
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Publications
10 results at Proceedings of SPIE - The International Society for Optical Engineering 2010
Evaluation of easily removable pellicle adhesive
- Nancy Zhou
- Monica Barrett
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperFabrication of dual damascene BEOL structures using a Multi-Level Multiple Exposure (MLME) scheme - Part 1. Lithographic patterning
- Dario L. Goldfarb
- Stefan Harrer
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperMulti-level integration of patternable low-κ material into advanced Cu BEOL
- Qinghuang Lin
- Shyng-Tsong Chen
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperHigh contact angle fluorosulfonamide-based materials for immersion lithography
- Daniel P. Sanders
- Linda K. Sundberg
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperFabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- Stefan Harrer
- John C Arnold
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperA method to characterize pattern density effects: Chemical flare and develop loading
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperA silicon-containing resist for immersion lithography
- Ratnam Sooriyakumaran
- Wu-Song Huang
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperProcess characterization of pitch-split resist materials for application at 16nm node
- Steven J. Holmes
- Cherry Tang
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperLasing from defect states in mixed-order organic laser structures
- K. Baumann
- Gabriele Raino
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper